Real Nano 3D Measurement Device for Semiconductors
Achieving nanoscale "actual measurement" with optical "vertical focus."
In the semiconductor industry, the miniaturization of wiring is progressing, and accurate inspection of wiring in the manufacturing process is essential. Wire disconnections and short circuits can significantly degrade product performance, necessitating high-precision measurement technology. Our Real Nano 3D measurement system accurately measures surface shapes at the nano level and contributes to solving challenges in wiring inspection. 【Application Scenarios】 - Measurement of surface roughness of semiconductor wiring - Measurement of wiring shapes - Detection of foreign object adhesion 【Benefits of Implementation】 - Improved accuracy of wiring inspection - Reduction of defective products - Enhanced product quality
- Company:アイ・ティー・エス・ジャパン
- Price:Other